Preparations and Evaluations of TiN/AlN Superlattces by Arc Ion Plating.
Year: 1994
Type: article
Source: Shinku
DOI: 10.3131/jvsj.37.929
Authors: Akira NAKAYAMA, Makoto SETOYAMA, Takashi YOSHIOKA
Institution: Sumitomo Electric Industries (Japan)
Language: English
Subfield: Mechanics of Materials
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2327367453