Work

Grid-unterstützte E-Beam-Belichtungssimulation

Year: 2011
Type: article
Authors: C. Dürr, A. Singer, M. Sülzle
Institution: EQUIcon (Germany)
Language: German
Open Access status: closed
OpenAlex ID: W2328778207
FWCI:
Cites: 3
Cited by:
Related to: 10