Grid-unterstützte E-Beam-Belichtungssimulation
Year: 2011
Type: article
DOI: 10.1007/bf03342006
Authors: C. Dürr, A. Singer, M. Sülzle
Institution: EQUIcon (Germany)
Language: German
Subfield: Computer Networks and Communications
Field: Computer Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2328778207
