Work

Electron Microscopy Observation of TiO2 Nanocrystal Evolution in High-Temperature Atomic Layer Deposition

Year: 2013

Type: article

Source: Nano Letters

DOI: 10.1021/nl403566u

Authors: Jian Shi, Zhaodong Li, Alexander Kvit, Sergiy Krylyuk, Albert V. Davydov, Xudong Wang

Institutions: University of Wisconsin–Madison, National Institute of Standards and Technology, Material Measurement Laboratory, University of Maryland, College Park

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: U.S. Department of Energy, Basic Energy Sciences

OpenAlex ID: W2329148346

FWCI: 3.593

Cites: 43

Cited by: 57

Related to: 10