Work

MEMS Devices Serve Measurement Instrument—An Optical Beam MEMS-Scanner and Innovative Micro Cantilevers—

Year: 2010

Type: article

Source: Journal of the Japan Society for Precision Engineering

DOI: 10.2493/jjspe.76.510

Author: Masashi KITAZAWA

Institution: Olympus (Japan)

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: bronze

OpenAlex ID: W2330581200

FWCI:

Cites: 12

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Related to: 10