Work

Strength and Fatigue Life of Nanocrystalline Titanium/Platinum Multilayer Membranes for Implantable MEMS Reservoir Array Devices

Year: 2008

Type: conference-paper

Source: MRS Proceedings

DOI: 10.1557/proc-1139-gg04-09

Authors: Karl Yoder, John Maloney, Jonathan Coppeta

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2331631407

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