Mesoscale Thin Film Actuator for Promoting Fluid Motion in Microfluidic and Nanofluidic Channels
Year: 2002
Type: article
Source: MRS Proceedings
Institutions: Motorola (United States), Virginia Tech
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2332295484
