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Finite Element Analysis for Demolding Process in Thermal Imprint Lithography

Year: 2007

Type: conference-paper

Source: ASME International Mechanical Engineering Congress and Exposition (IMECE)

DOI: 10.1115/imece2007-43699

Authors: Zhichao Song, Jaejong Lee, Sunggook Park

Institutions: Louisiana State University, Korea Institute of Machinery & Materials

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2334010046

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