Work

Film Bulk Acoustic Resonators for Parallel Mass Sensing

Year: 2011

Type: article

Source: MRS Proceedings

DOI: 10.1557/opl.2011.1521

Authors: Shih-Jui Chen, Anderson Lin, Lukas Baumgartel, Eun Sok Kim

Institution: University of Southern California

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Institutes of Health

Award: G9000201858

OpenAlex ID: W2334040017

FWCI:

Cites: 10

Cited by: 1

Related to: 10