Work

Development of a Light-Driven Thin-Film Piezoelectric Microactuator

Year: 2005

Type: conference-paper

Source: ASME International Mechanical Engineering Congress and Exposition (IMECE)

DOI: 10.1115/imece2005-79819

Authors: Mandar Deshpande, Laxman Saggere

Institution: University of Illinois Chicago

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Affordable and clean energy

Open Access status: closed

OpenAlex ID: W2334093248

FWCI: 1.1

Cites: 11

Cited by: 2

Related to: 10