Work

Molecular beam monitoring by cold cathode discharge induced emission spectroscopy.

Year: 1988

Type: article

Source: Shinku

DOI: 10.3131/jvsj.31.432

Authors: Junro SAKAI, Guorong CHEN, Kimiaki KIRAMA, Kazunori KATO, Shun-ichi MURAKAMI

Institutions: Anelva Corporation (Japan), Fudan University

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: bronze

OpenAlex ID: W2335378192

FWCI:

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