Designing CAD tools for plasma reactor design - A framework for applied physics modeling and an application to inductively coupled plasmas
Year: 1996
Type: conference-paper
DOI: 10.2514/6.1996-587
Authors: W. Hitchon, K. Kramer, Daniel Beale, Amy Wendt, E. Keiter
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2335505894
