Work

Design, fabrication, and testing of surface acoustic wave devices for semiconductor cleaning applications

Year: 2016

Type: article

Source: Microelectronic Engineering

DOI: 10.1016/j.mee.2016.04.006

Authors: G. Potter, N. Tokranova, A. Rastegar, J. Castracane

Institution: SUNY Polytechnic Institute

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2339331509

FWCI: 0.964

Cites: 20

Cited by: 16

Related to: 10