Work

Wafer-level Vacuum-packaged Tri-axial Accelerometer With Nano Airgaps

Year: 2013

Type: article

Authors: Yaesuk Jeong, Diego Emilio Serrano, V. Keesara, Wang-Kyung Sung, Farrokh Ayazi

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2340363217

FWCI: 1.2

Cites: 10

Cited by: 10

Related to: 10