Substrate dependentd characteristics of hydrogenated amorphous silicon films prepared by glow discharge method.
Year: 1989
Type: article
Authors: Mitsuya Motohashi, Kazuaki Homma, Toyoji Fukami
Institution: Tokyo Denki University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: bronze
OpenAlex ID: W2340420068
