Work

Highly conformal fabrication of nanopatterns on non-planar surfaces

Year: 2016

Type: article

Source: Nanoscale

DOI: 10.1039/c6nr00749j

Authors: Inès Massiot, Christos Trompoukis, Kristof Lodewijks, Valérie Depauw, Alexandre Dmitriev

Institutions: Chalmers University of Technology, IMEC, University of Gothenburg

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funder: Stiftelsen för Strategisk Forskning

OpenAlex ID: W2345684908

FWCI: 0.514

Cites: 39

Cited by: 11

Related to: 10