Work

MEMS Geometric Parameters Measurement Based on White Light Phase Shifting Interferometry

Year: 2011

Type: article

Source: Nanotechnology and Precision Engineering

Author: Chunguang Hu

Institution: Tianjin University

Language: English

Topic: Optical measurement and interference techniques

Subfield: Computer Vision and Pattern Recognition

Field: Computer Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2351988401

FWCI:

Cites:

Cited by:

Related to: 10