Work

Silicon hybrid integration

Year: 2011

Type: article

Source: SEMI-IR

Authors: Xianyao Li, Yuan Taonu, Shiqian Shao, Zujun Shi, Yi Wang, Yude Yu, Yu Jinzhong

Institutions: Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Chinese Academy of Sciences, State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors

Language: English

Topic: 3D IC and TSV technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2353149660

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