FTIR and XPS Analysis of Directly Bonded Si/Si Interface
Year: 2004
Type: article
Source: Bandaoti guangdian
Author: He Guorong
Institution: Xiamen University
Language: English
Topic: 3D IC and TSV technologies
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2353418080