Experiment Research of Oxygen Flux Effect on Titanium Dioxide Films by Reactive Magbetron Sputtering
Year: 2007
Type: article
Source: Vacuum and Cryogenics
Author: Kun Liu
Institution: Chinese Academy of Sciences
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2365179855