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INVESTIGATION OF THE STRESS OF SiO_2 FILMS DEPOSITED ON SAPPHIRE SUBSTRATE

Year: 2008

Type: article

Source: Guisuanyan xuebao

Author: Zheng‐Tang Liu

Institutions: Northwestern Polytechnical University, State Key Laboratory of Solidification Processing

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2368132576

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