Study on Preparation of Polycrystalline Silicon Thin Films by PECVD
Year: 2006
Type: article
Source: Rengong jingti xuebao
Author: Wen Dian-zhong
Institution: Heilongjiang University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2368370097