Model based correction of placement error in EBL and its verification
Year: 2016
Type: conference-paper
DOI: 10.1117/12.2244793
Authors: Sergey Babin, Sergey Borisov, Vladimir Militsin, Tadashi Komagata, Tetsuro Wakatsuki
Institutions: Abeam Technologies (United States), JEOL (Japan)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2372595401