Work

New isolation technology of IC:STI isolation

Year: 2002

Type: article

Author: Wen Li

Language: English

Topic: Advancements in Semiconductor Devices and Circuit Design

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W2380309784

FWCI:

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Related to: 20