Work

Design and fabrication of a low-noise MEMS accelerometer

Year: 2014

Type: article

Source: Transducer and Microsystem Technologies

Author: Song Men

Institution: Northwestern Polytechnical University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2393756330

FWCI: 0.345

Cites:

Cited by: 3

Related to: 10