Work

First-ever measurements of ion energy distribution functions in EUV induced plasma

Year: 2016

Type: other

Source: TU/e Research Portal

Authors: Ven, van de, THM Tijn, Reefman, P Pim, Osorio, EA, Banine, VY Vadim, Beckers, J Job

Institution: ASML (Netherlands)

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: green

OpenAlex ID: W2397435251

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