Study and simulation of the sputtering process of material layers in plasma
Work
Year: 2016
Type: article
Authors Abdelkader Bouazza, A. Settaouti
Cites: 13
Cited by: 11
Related to: 10
FWCI: 0.477
Citation percentile (by year/subfield): 73.5
Subfield: Mechanics of Materials
Field: Engineering
Domain: Physical Sciences
Open Access status: closed