Work

High density pillar arrays for high fidelity neural sensors

Year: 2012
Type: article
Abstract: Individual addressability of sensing electrode (Si pillars on sapphire) All solid-state bonding technique by NiSi x Si Deep RIE (DRIE) dry etching Physiology measurement Evoked potentials from a frog retina cell Detect the local signal without losing sensitivity Conclusion
Language: English
Open Access status: green
OpenAlex ID: W2417170047
FWCI:
Cites:
Cited by:
Related to: 10