Work

New Ic Process Technology

Year: 1977

Type: conference-paper

Source: International Conference on Solid State Devices and Materials (SSDM)

DOI: 10.7567/ssdm.1977.a-8-2

Authors: Shuichi Sato, Tadanori Yamaguchi, Douglas Ritchie, Karen Seaward, Jack Sachitano, Peter Burke

Language: English

Topic: Advancements in Semiconductor Devices and Circuit Design

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W2462006612

FWCI:

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Related to: 10