Work

The Effects of Ions on the Formation of Polysilicon Films

Year: 1986

Type: conference-paper

Source: International Conference on Solid State Devices and Materials (SSDM)

DOI: 10.7567/ssdm.1986.b-9-3

Authors: A. Kawamura, J. Kudo, K. Iguchi, Y. Kubota, H. Sato, M. Koba, K. Awane

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2464568647

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