Work

Micro Fabrication Technology of Ferroelectric Film and its Application to MEMS

Year: 2015

Type: conference-paper

Authors: Masaaki Ichiki, Takeshi Kobayashi, Zhan-jie Wang, Hidemasaichikawa, Ryutaro Maeda

Institution: National Institute of Advanced Industrial Science and Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2464653687

FWCI:

Cites: 8

Cited by: 1

Related to: 10