Four-zone varifocus mirrors with adaptive control of primary and higher-order spherical aberration
Year: 2016
Type: article
Abstract: Electrostatically actuated deformable mirrors with four concentric annular electrodes can exert independent control over defocus as well as primary, secondary, and tertiary spherical aberration. In this paper we use both numerical modeling and physical measurements to characterize recently developed deformable mirrors with respect to the amount of spherical aberration each can impart, and the dependence of that aberration control on the amount of defocus the mirror is providing. We find that a four-zone, 4 mm diameter mirror can generate surface shapes with arbitrary primary, secondary, and tertiary spherical aberration over ranges of ±0.4, ±0.2, and ±0.15 μm, respectively, referred to a non-normalized Zernike polynomial basis. We demonstrate the utility of this mirror for aberration-compensated focusing of a high NA optical system.
Source: Applied Optics
DOI: 10.1364/ao.55.005208
Institution: Montana State University
Language: English
Subfield: Atomic and Molecular Physics, and Optics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: green
Awards: STTR Phase II: Compact Aberration Compensated Focus and Scan Control for Biomedical Sensors, Integrated wide-field imaging and confocal microscopy with agile 3D beam scanning, IDBR: Agile Electronic Focus and Aberration Control for Live Animal Microscopy, MRI: Development of an Active/Adaptive Scanning Laser Microscope
OpenAlex ID: W2469886042
