Epitaxial integration of TiO2 with Si(100) through a novel approach of oxidation of TiN/Si(100) epitaxial heterostructure
Year: 2016
Type: article
Source: MRS Advances
DOI: 10.1557/adv.2016.463
Authors: A. Moatti, R. Bayati, S. Singamaneni, J. Narayan
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2470161669
