Work

A comparative study on the Si precursors for the atomic layer deposition of silicon nitride thin films

Year: 2004

Type: article

Source: Journal of the Korean Physical Society

Authors: Won‐Jun Lee, Joo-Hyeon Lee, Chong Ook Park, Youn-Seoung Lee, Seung-Jung Shin, Sa‐Kyun Rha

Institutions: Sejong University, Korea Advanced Institute of Science and Technology, Hanbat National University, Hansei University

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2476128086

FWCI: 0.633

Cites: 1

Cited by: 33

Related to: 10