Why is (111) Silicon a Better Mechanical Material for MEMS?
Year: 2001
Type: book-chapter
Source: Springer eBooks
Authors: Jongpal Kim, Dong-il Cho, Richard S. Muller
Institutions: Seoul National University, University of California, Berkeley
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2476858967