Chemical Amplification Resists for Microlithography
Year: 2005
Type: book-chapter
Source: Advances in polymer science
Parent work: Microlithography · Molecular Imprinting
DOI: 10.1007/b97574
Author: Hiroshi Ito
Institution: IBM Research - Almaden
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2486119844