Work

Grazing-Incidence EUV Collectors

Year: 2010

Type: book-chapter

Source: SPIE eBooks

DOI: 10.1117/3.613774.ch33

Authors: Piotr Marczuk, Wilhelm Egle

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2487389298

FWCI:

Cites:

Cited by: 1

Related to: 10