Power Mems and Microengines
Year: 1997
Type: report
DOI: 10.21236/ada451178
Authors: A. H. Epstein, S. D. Senturia, G. Anathasuresh, A. Ayon, K. Breuer, K-S. Chen, F. E. Ehrich, G. Gauba, R. Ghodssi, C. Groshenry
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2490355375