Work

Dry Etching of BiSrCaCuO Thin Films using C2H6 and O2

Year: 1994

Type: book-chapter

Source: Springer eBooks

DOI: 10.1007/978-4-431-68266-0_219

Authors: Toshiyuki Oishi, Tetsuya Takami, Ken’ichi Kuroda, Kazuyoshi Kojima, Osamu Wada, Masahiro Nunoshita

Institution: Mitsubishi Electric (Japan)

Language: English

Topic: Physics of Superconductivity and Magnetism

Subfield: Condensed Matter Physics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2497342256

FWCI:

Cites: 4

Cited by:

Related to: 10