Work

Physics and Chemistry of Impurity Diffusion and Oxidation of Silicon

Year: 1981

Type: book-chapter

Source: Elsevier eBooks

DOI: 10.1016/b978-0-12-002957-0.50006-6

Author: RICHARD B. FAIR

Language: English

Topic: Silicon and Solar Cell Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2500834436

FWCI: 3.777

Cites: 171

Cited by: 28

Related to: 10