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使用混合式(電容式/壓阻式)感測機制的微加速計
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Year:
2008
Type:
dissertation
Author:
傅至璋
Language:
Chinese
Topic:
Advanced MEMS and NEMS Technologies
Subfield:
Electrical and Electronic Engineering
Field:
Engineering
Domain:
Physical Sciences
Open Access status:
closed
OpenAlex ID:
W2502505565
Cites:
Cited by:
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