Work

Surface etching mechanism of carbon-doped Ge2Sb2Te5 phase change material in fluorocarbon plasma

Year: 2016

Type: article

Source: Applied Physics A

DOI: 10.1007/s00339-016-0381-4

Authors: Lanlan Shen, Sannian Song, Zhitang Song, Le Li, Tianqi Guo, Yan Cheng, Shilong Lv, Liangcai Wu, Bo Liu, Songlin Feng

Institutions: Chinese Academy of Sciences, Shanghai Institute of Microsystem and Information Technology, University of Chinese Academy of Sciences, State Key Laboratory of Functional Materials for Informatics

Language: English

Topic: Phase-change materials and chalcogenides

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Awards: G3219903371, G3539783434, G4588063683

OpenAlex ID: W2508444530

FWCI: 0.437

Cites: 27

Cited by: 9

Related to: 10