Year: 1982
Type: article
Abstract: The MBE apparatus has progressed rapidly in the last two years, leading to the appearance of high performance device based on the MBE method. The recently developed MBE apparatus is described and, also, the history and the futuretrends of such systems.
Source: Hyomen Kagaku
DOI: 10.1380/jsssj.3.125
Authors: Shunichi MURAKAMI, Tetsuo ISHIDA, Yoshitaka HAYASHI
Institution: Anelva Corporation (Japan)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: diamond
OpenAlex ID: W2509611755