Work

Thermomigrated Junction Isolation of Deep Reactive Ion Etched, Single Crystal Silicon Devices, and its Application to Inertial Navigation Systems

Year: 2004

Type: dissertation

Source: UPT. Syiah Kuala University Library (Syiah Kuala University)

Author: Charles Choi Chung

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W2510024596

Cites: 20

Cited by:

Related to: 10