Work

Hot Filament Chemical Vapor Deposition: Enabling the Scalable Synthesis of Bilayer Graphene and Other Carbon Materials

Year: 2016

Type: book-chapter

Abstract: The hot filament chemical vapor deposition (HFCVD) technique is limited only by the size of the reactor and lends itself to be incorporated into continuous roll-to-roll industrial fabrication processes. We discuss the HFCVD reactor design and the interplay between the reactor parameters, such as filament and substrate temperatures, filament-to-substrate distance, and total pressure. Special attention is given to the large-area synthesis of bilayer graphene on copper, which is successfully grown by HFCVD with transmittance greater than 90% in the visible region and no gaps. We also discuss the HFCVD synthesis of carbon nanotubes, microcrystalline diamond, and nanocrystalline diamond.

Source: InTech eBooks

DOI: 10.5772/63921

Authors: Frank Mendoza, Tej B. Limbu, Brad R. Weiner, Gerardo Morell

Institutions: University of Puerto Rico at Río Piedras, University of Puerto Rico System

Language: English

Topic: Graphene research and applications

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: hybrid

Funders: National Science Foundation, National Aeronautics and Space Administration, Institute for Functional Nanomaterials, Office of Experimental Program to Stimulate Competitive Research

Awards: ESTABLISHED IN 1994 BY THE RESOURCE CENTER FOR SCIENCE AND ENGINEERING (RCSE) OF THE UNIVERSITY OF PUERTO RICO (UPR) IN CONJUNCTION WITH THE NATIONAL, G5794402081, Nanotechnology from Basic Science to Emerging Applications: Institute for Functional Nanomaterials (IFN), G984442599