Work

Electrical Characterization of Submicrometer Silicon Devices by Cross-sectional Contact Mode Atomic Force Microscopy. Discussion

Year: 1996

Type: article

Source: Scanning microscopy

Authors: Peter Wolf, Thomas Trenkler, Trudo Clarysse, M. Caymax, W. Vandervorst, J. Snauwaert, L. Hellemans, Chih‐Kang Shih, D. J. Thomson, Matthew D. Johnson

Language: English

Topic: Force Microscopy Techniques and Applications

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2520736593

FWCI:

Cites:

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Related to: 20