Preferential growth of μc-Ge : H along the crystallographic axes of Si and Ge substrates by ECR plasma CVD
Year: 2003
Type: article
Authors: S. Kobayashi, T. Shimizu, T. Aoki, T. Asakawa
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W25241949
