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Reactive ion etching effects on carbon-doped Ge2Sb2Te5 phase change material in CF4/Ar plasma

Year: 2016

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.2245726

Authors: Lanlan Shen, Sannian Song, Zhitang Song, Le Li, Tianqi Guo, Bo Liu, Liangcai Wu, Yan Cheng, Songlin Feng

Institution: Shanghai Institute of Microsystem and Information Technology

Language: English

Topic: Phase-change materials and chalcogenides

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2530838868

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Cites: 15

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Related to: 10