Work

Phase change properties of Ti-Sb-Te thin films deposited by thermal atomic layer deposition

Year: 2016

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.2246211

Authors: Sannian Song, Lanlan Shen, Zhitang Song, Dongning Yao, Tianqi Guo, Le Li, Bo Liu, Liangcai Wu, Yan Cheng, Yuqiang Ding, Songlin Feng

Institutions: Shanghai Institute of Microsystem and Information Technology, Jiangnan University

Language: English

Topic: Phase-change materials and chalcogenides

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2531077944

FWCI: 1.367

Cites: 23

Cited by: 2

Related to: 10