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Thermodynamics of the production of condensed phases in the CVD process of B x C with BCl 3 -C 3 H 6 (propylene)-H 2 precursors

Year: 2014
Type: article
Language: English
Open Access status: closed
OpenAlex ID: W2533817545
FWCI:
Cites: 1
Cited by: 1
Related to: 10