Work

Piezoelectric MEMS for audio signal transduction, microfluidic management, resonant mass sensing, and movable surface micromachined structures

Year: 2008

Type: conference-paper

Source: Proceedings/Proceedings - IEEE Ultrasonics Symposium

DOI: 10.1109/ultsym.2008.0223

Author: Eun Sok Kim

Institution: University of Southern California

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2537539224

FWCI:

Cites: 32

Cited by: 2

Related to: 10